超声键合换能系统的非稳态特性试验

测得超声键合振动系统的输入电流、电压,用激光多普勒测速仪测得换能杆系统的响应速度,研究了超声引线键合工艺中超声振动系统的非稳态动力学特性.据此对超声加卸载过程分段,进行频谱分析和非稳态特性建模,并研究了相关的试验方法.结果表明,振动系统拟共振态腹点的速度均方值可作为系统机械能的等效量,供系统动力学特性试验研究;快速键合时系统惯性使功率源的开关不等同于键合机超声振动系统的启停.这些均有助于键合机换能系统的工艺建模和优化.

Non-steady characteristics of ultrasonic bonding transducer system

The driving voltage/current and response velocity of an ultrasonic bonding transducer were measured to obtain the dynamical characteristics of the ultrasonic vibration system. The response velocity of transducer was measured by the laser Doppler vibrometer. The loading and unloading process were analyzed and modeled in three segments. Experimental study shows that the square of velocity generally is associated with the energy of vibration. Unsteady status of a transducer can be represented by the vibration velocity after PLL start-up. The on/off of an ultrasonic generator is not an actual start/stop of the transducer that it is working with. Experimental results can be used to model a real ultrasonic bonder and optimize its functions.