| 聚焦离子束组合装置及应用 |
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| 引用本文： | 马向国,刘同娟,顾文琪.聚焦离子束组合装置及应用[J].微纳电子技术,2007,44(6):328-330,336. |
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| 作者姓名： | 马向国 刘同娟 顾文琪 |
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| 作者单位： | 1. 北京物资学院,北京,101149
2. 中国科学院,电工研究所,北京,100080 |
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| 摘 要： | 聚焦离子束技术是一种集形貌观测、定位制样、成分分析、薄膜淀积和无掩膜刻蚀各过程于一身的新型微纳加工技术。对电子离子双束纳米工作站,聚焦离子束、扫描电镜和Ar离子束构成的“三束”显微镜系统的原理和应用作了详细介绍,同时也对聚焦离子束-分子束外延组合装置、聚焦离子束与二次离子质谱仪(SIMS)的组合装置以及单轴聚焦离子/电子束(FIEB)装置作了简单介绍。
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| 关 键 词： | 聚焦离子束 组合装置 微纳加工技术 |
| 文章编号： | 1671-4776（2007）06-0328-03 |
| 修稿时间： | 2007-02-14 |
Focused Ion Beam Combination Equipment and Application |
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| MA Xiang-guo,LIU Tong-juan,GU Wen-qi.Focused Ion Beam Combination Equipment and Application[J].Micronanoelectronic Technology,2007,44(6):328-330,336. |
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| Authors: | MA Xiang-guo LIU Tong-juan GU Wen-qi |
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| Affiliation: | 1.BeiJing Materials Institute, Beijing 101149, China; 2.Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100080, China |
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| Abstract: | Focused ion beam is an advanced micro/nano technology for figure observation,orientation making-sample,component analysis,film deposition and maskless etching. The principles and applications of electron and ion dual beam nanometer working station and three beam microscope made up of FIB,SEM and Ar ion beam were introduced. FIB-MBE combination equipment,FIB-SIMES combination equipment and FIEB equipment were also introduced. |
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| Keywords: | focused ion beam(FIB) combination equipment micro/nano fabrication-technology |
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