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Optimization of the Length of Silicon Nanowires Prepared from MACE Method Using Gene Expression Programming and Genetic Algorithm |
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| Authors: | Zeraati Malihe Abbasi Hossein Safinejad Moosareza Kazemzadeh Parya Chauhan Narendra Pal Singh Sargazi Ghasem |
| Affiliation: | 1.Department of Materials Engineering, Shahid Bahonar University of Kerman, Kerman, 761694111, Iran ;2.Department of Computer Engineering, Azad University of Tangestan (Ahram), Tangestan (Ahram), Bushehr, Iran ;3.Department of Electrical Engineering, RF MEMS & Micro Bio-Nano Electronics (MBNE) Lab, Shahid Bahonar University of Kerman, Kerman, Iran ;4.Department of Chemistry, Lorestan University, Korramabad, Iran ;5.Department of Chemistry, Faculty of Science, Bhupal Nobles’ University, Udaipur, Rajasthan, 313002, India ;6.Noncommunicable Diseases Research Center, Bam University of Medical Sciences, Bam, Iran ; |
| Abstract: | Silicon - Metal-assisted chemical etching (MACE) of silicon is used in this study to fabricate silicon nanowire arrays (SiNWs) of different length. This method was modeled using gene expression... |
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