Machining,Characterization and Optimization: A Novel Approach for Machining Channels on Silicon Wafer Using Tailor-Made Micro Abrasive Jet Machining |
| |
| Authors: | Tomy Anu Hiremath Somashekhar S |
| |
| Affiliation: | 1.Department of Mechanical Engineering, Indian Institute of Technology Madras, Chennai, Tamil Nadu, 600036, India
; |
| |
| Abstract: | Silicon - Literature reveals that machining a silicon wafer is very arduous due to its high brittle nature and low fracture toughness. Researchers have attempted to machine features on a silicon... |
| |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ |
|
