Microwave performance-property relationships of YBa2Cu3O7-δ thin films grown on LaAlO3 (001) substrate

We report correlations between growth parameters, structure and microwave performance for YBa₂Cu₃O7-δ (YBCO) thin films. Two series of YBCO thin films were grown byin-situ laser ablation. The first series were deposited at 100 mTorr oxygen pressure with a laser fluence of 2.9 Joule/cm², the second series were deposited at 600 mTorr of oxygen and a higher laser fluence of 5 Joule/cm². Microwave performance of these films was evaluated using a 5.6 GHz resonator. In both series, we found that films with higherT _c , narrower x-ray rocking curve width, and sharper electron channeling pattern tend to have higher microwave resonator Qs. Optimal film growth conditions were infered from this systematic study. Films grown at higher oxygen pressure have smoother surfaces and fewer second phases.