Transient charge accumulation in a capacitive self-assembled monolayer

Charge accumulation in an organosilane monolayer self-assembled on silicon is studied using electron-spectroscopy-based chemically resolved electrical measurements (CREM). By resolving the net electrical response of the organic layer, a significant capability of holding extra charge is indicated. Quantum size effects at a molecularly thin layer and the role of competing discharge mechanisms, including defect-assisted leakage currents, are discussed.