Temperature-dependent electrical properties of plasma-grown gate oxides on tensile-strained Si0.993 C0.007 layers |
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Authors: | R Mahapatra G S Kar S K Ray S Maikap |
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Affiliation: | (1) Department of Physics and Meteorology, IIT, Kharagpur-, 721 302, India;(2) Center for Microstructure Science of Materials, Schools of Materials Science and Engineering, Seoul National University, Seoul, 151-742, South Korea |
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Abstract: | Ultra-thin (<10 nm) gate oxides have been grown directly on tensile-strained Si0.993 C0.007 layers at a low temperature using microwave O2-plasma. The changes in gate voltage ( Vg), flat-band voltage (VFB), oxide charge density (Qox/q) an interface state density (Dit) have been studied using a metal-oxide-semiconductor structure over the temperature range of 77–450 K. Inversion capacitance increases with temperature above 400 K, leading to a transition from high-frequency to low-frequency characteristics. The dominant types of charges in the oxide are found to be strongly temperature dependent. It is found that charge-trapping properties under Fowler–Nordheim (F–N) constant-current stressing are significantly improved with increasing temperature. |
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