| 扫描电镜低电压显微的实现 |
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| 引用本文： | 梁显鉴. 扫描电镜低电压显微的实现[J]. 分析测试仪器通讯, 1997, 7(1): 17-20 |
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| 作者姓名： | 梁显鉴 |
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| 作者单位： | 华南师范大学实验中心 |
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| 摘 要： | 介绍了扫描电镜低电压显微的优点和限制及为实现低电压显微而对扫描电镜的改进。
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| 关 键 词： | 扫描电镜 加速电压 电子枪 集成电路 显微镜 |
The Realization of Low Voltage Microscopy in Scanning Electron Microscope |
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| Abstract: | In this paper the advantages and limitations of low voltage microscopy in scanning electron microscope are described. And the main improvements made in scanning electron microscope for low voltage microscopy are presented. |
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| Keywords: | , scanning electron microscope, accelerating voltage, electron guns, detector, image processing |
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