| 交流测试信号振幅对SrTiO_3薄膜介电性能的影响 |
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| 引用本文： | 段滨,刘兴钊,何世明,李言荣. 交流测试信号振幅对SrTiO_3薄膜介电性能的影响[J]. 微纳电子技术, 2005, 42(10): 481-483 |
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| 作者姓名： | 段滨 刘兴钊 何世明 李言荣 |
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| 作者单位： | 电子科技大学,微电子与固体电子学院,成都,610054 |
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| 摘 要： | 研究了交流测试信号振幅对SrTiO3薄膜介电性质的影响,并比较研究了不同氧空位浓度的SrTiO3薄膜介电性质随测试信号振幅的变化规律。经研究发现,测试信号振幅对高氧空位浓度钛酸锶薄膜的相对介电常数有明显影响,而对低氧空位浓度钛酸锶薄膜的相对介电常数影响较小。运用薄膜极化响应机理对这一实验现象进行了解释。
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| 关 键 词： | 钛酸锶薄膜 氧空位 介电性能 极化 |
| 文章编号： | 1671-4776(2005)10-0481-03 |
| 修稿时间： | 2005-01-31 |
Effect of AC Measuring Signal Level on the Dielectric Properties of SrTiO3 Thin Films |
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| DUAN Bin,LIU Xing-zhao,HE Shi-ming,LI Yan-rong. Effect of AC Measuring Signal Level on the Dielectric Properties of SrTiO3 Thin Films[J]. Micronanoelectronic Technology, 2005, 42(10): 481-483 |
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| Authors: | DUAN Bin LIU Xing-zhao HE Shi-ming LI Yan-rong |
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| Abstract: | The effect of AC measuring signal level on the dielectric properties of SrTiO3 thin films was investigated and the variation rule of the dielectric properties of SrTiO3 thin films with different concentration of oxygen vacancies according to AC measuring signal level was studied.The result shows that the signal level has an obvious effect on the dielectric constant of SrTiO3 films with high concentration of oxygen vacancies,while it has a little effect on the dielectric constant of SrTiO3 films with low concentration of oxygen vacancies.This phenomenon is explained by the dielectric polarization theory. |
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| Keywords: | SrTiO3 thin films oxygen vacancies dielectric property polarization |
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