| 水平静电驱动式多晶3C-SiC折叠悬臂梁谐振器微结构 |
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| 引用本文： | 王亮,赵永梅,宁瑾,孙国胜,王雷,刘兴坊,赵万顺,曾一平,李晋闽. 水平静电驱动式多晶3C-SiC折叠悬臂梁谐振器微结构[J]. 半导体学报, 2008, 29(8): 1453-1456 |
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| 作者姓名： | 王亮 赵永梅 宁瑾 孙国胜 王雷 刘兴坊 赵万顺 曾一平 李晋闽 |
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| 作者单位： | 中国科学院半导体研究所 新材料中心,北京 100083;中国科学院传感技术国家重点实验室,北京 100083;中国科学院半导体研究所 新材料中心,北京 100083;中国科学院传感技术国家重点实验室,北京 100083;中国科学院传感技术国家重点实验室,北京 100083;中国科学院半导体研究所 新材料中心,北京 100083;中国科学院传感技术国家重点实验室,北京 100083;中国科学院半导体研究所 新材料中心,北京 100083;中国科学院半导体研究所 新材料中心,北京 100083;中国科学院传感技术国家重点实验室,北京 100083;中国科学院半导体研究所 新材料中心,北京 100083;中国科学院半导体研究所 新材料中心,北京 100083;中国科学院半导体研究所 新材料中心,北京 100083 |
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| 基金项目： | 国家自然科学基金，国家高技术研究发展计划(863计划) |
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| 摘 要： | 介绍了一种微机械叉指静电驱动折叠悬臂梁谐振器的设计和制作方法.将Rayleigh分析法和有限元分析法结合起来分析调整器件尺寸和材料参数对器件性能的影响.制作了三种不同悬臂梁宽度的微机械横向谐振器件,经实验检测它们的谐振频率分别为64.5,147.2,255.5kHz,与模拟结果符合得很好.该结果显示由于具有很高的杨式模量,利用多晶3C-SiC材料体系制作的谐振器件能够具有更高的谐振频率.
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| 关 键 词： | 横向谐振器件 折叠悬臂梁 叉指结构 微机械系统 谐振器 碳化硅 |
| 收稿时间： | 2008-02-23 |
| 修稿时间： | 2008-04-07 |
Laterally Electrostatically Driven Poly 3C-SiC Folded-Beam Resonant Microstructures |
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| Wang Liang,Zhao Yongmei,Ning Jin,Sun Guosheng,Wang Lei,Liu Xingfang,Zhao Wanshun,Zeng Yiping and Li Jinmin. Laterally Electrostatically Driven Poly 3C-SiC Folded-Beam Resonant Microstructures[J]. Chinese Journal of Semiconductors, 2008, 29(8): 1453-1456 |
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| Authors: | Wang Liang Zhao Yongmei Ning Jin Sun Guosheng Wang Lei Liu Xingfang Zhao Wanshun Zeng Yiping Li Jinmin |
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| Affiliation: | Novel Semiconductor Material Laboratory,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;State Key Laboratory of Transducer Technology,Chinese Academy of Sciences,Beijing 100083,China;Novel Semiconductor Material Laboratory,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;State Key Laboratory of Transducer Technology,Chinese Academy of Sciences,Beijing 100083,China;State Key Laboratory of Transducer Technology,Chinese Academy of Sciences,Beijing 100083,China;Novel Semiconductor Material Laboratory,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;State Key Laboratory of Transducer Technology,Chinese Academy of Sciences,Beijing 100083,China;Novel Semiconductor Material Laboratory,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Novel Semiconductor Material Laboratory,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;State Key Laboratory of Transducer Technology,Chinese Academy of Sciences,Beijing 100083,China;Novel Semiconductor Material Laboratory,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Novel Semiconductor Material Laboratory,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Novel Semiconductor Material Laboratory,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China |
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| Abstract: | Micromachined comb-drive electrostatic resonators with folded-cantilever beams were designed and fabricated.A combination of Rayleigh's method and finite-element analysis was used to calculate the resonant frequency drift as we adjusted the device geometry and material parameters.Three micromachined lateral resonant resonators with different beam widths were fabricated.Their resonant frequencies were experimentally measured to be 64.5,147.2,and 255.5kHz,respectively,which are in good agreement with the simu... |
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| Keywords: | lateral resonant device folded-beam comb structure MEMS resonator silicon carbide |
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