| 单平行四杆柔性铰链机构的输出位移和耦合误差分析 |
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| 引用本文： | 沈剑英,杨世锡,周庆华,严拱标,曹坚.单平行四杆柔性铰链机构的输出位移和耦合误差分析[J].机床与液压,2004(3):27-28,116. |
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| 作者姓名： | 沈剑英 杨世锡 周庆华 严拱标 曹坚 |
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| 作者单位： | 浙江大学,杭州,310027;嘉兴学院,嘉兴,314001 |
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| 基金项目： | 浙江省自然基金资助项目 (项目编号 :5 0 2 0 2 1) |
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| 摘 要： | 本文建立了单平行四杆柔性铰链机构的输出位移和耦合误差的公式，并用有限元法分析在其主要参数对输出位移和耦合误差的不同影响，指出耦合误差的存在对纳米级工作台的定位精度和分辨率有较大的影响。
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| 关 键 词： | 柔性铰链机构 单平行四杆机构 输出位移 耦合误差 |
| 文章编号： | 1001-3881(2004)3-027-2 |
Analysis on the Output Displacement and Coupling Error of Single Parallel Four -bar Flexure Hinge Mechanism |
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| SHEN Jian-ying,YANG Shi-xi,ZHOU Qing-hua,YAN Gong-biao,CAO jian.Analysis on the Output Displacement and Coupling Error of Single Parallel Four -bar Flexure Hinge Mechanism[J].Machine Tool & Hydraulics,2004(3):27-28,116. |
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| Authors: | SHEN Jian-ying YANG Shi-xi ZHOU Qing-hua YAN Gong-biao CAO jian |
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| Affiliation: | SHEN Jian-ying1,YANG Shi-xi1,ZHOU Qing-hua2,YAN Gong-biao1,CAO jian2 |
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| Abstract: | The formulas of the output displacement and coupling error of single parallel four-bar flexure hinge mechanism was established.The different influence on the output displacement and coupling error of the main parameters of the mechanism was analyzed with finite element method. A conclusion that the coupling error had impacted on the positioning accuracy and resolution of the nanometer stage was obtained. |
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| Keywords: | Flexure hinge mechanism Single parallel four-bar mechanism Output displacement Coupling error |
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