| 用于传感器的声表面波谐振器耦合模理论研究 |
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| 引用本文： | 戴恩光,冯冠平.用于传感器的声表面波谐振器耦合模理论研究[J].电子测量与仪器学报,1997,11(4):9-14. |
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| 作者姓名： | 戴恩光 冯冠平 |
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| 作者单位： | 清华大学精密仪器与机械学系!北京，100084，清华大学精密仪器与机械学系!北京，100084 |
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| 摘 要： | 本文主要研究声表面波耦合模理论在声表面波谐振器中的应用。本文结合声表面波谐振器的特点，对谐振器表面沉积介质薄膜后引起器件结构参数的变化进行了分析，为研究基于ＳＡＷ谐振器的传感器提供了一种方法。
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| 关 键 词： | SAW 谐振器 耦合模理论 传感器 声表面波 |
Study on Sensors Based on the Surface Acoustic Wave Resonator With coupling-Of-Modes Method |
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| Dai Enguang, Feng Guanping.Study on Sensors Based on the Surface Acoustic Wave Resonator With coupling-Of-Modes Method[J].Journal of Electronic Measurement and Instrument,1997,11(4):9-14. |
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| Authors: | Dai Enguang Feng Guanping |
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| Abstract: | Coupling-Of-Modes method is used for the analysis of surface acoustic wave resonators. From the view of point of SAW resonator, the paper has analysed the change of thedevice parameter after medium film is deposited onto the surface. the method can be used forthe study of sensors based upon SAW resonator. |
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| Keywords: | SAW resonator Coupling-Of-Modes Sensor |
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