A flexure-based long-stroke fast tool servo for diamond turning |
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| Authors: | Qiang Liu Xiaoqin Zhou Pengzi Xu Qing Zou Chao Lin |
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| Affiliation: | 1. School of Mechanical Science and Engineering, Jilin University, Changchun, China
2. Space Optics Research Laboratory, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, China
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| Abstract: | This paper describes the development of the fast tool servo (FTS) in detail and categorizes existing FTSs according to different principles. The characteristics and differences of these FTSs have been analyzed. A flexure-based long-stroke FTS system for diamond turning is presented with displacement range of 1?mm and bandwidths of 10?Hz. The vertical jump is about 0.045?μm, and the full stroke tracking error is less than 0.15%. A voice coil motor and a piezoelectric actuator are used as the driving elements, and two flexure hinges are developed as the guide mechanisms. The FTS utilizes a linear encoder and a capacitive sensor to measure the displacement of the tool for closed-loop control. The electromechanical design of the FTS and its motion analysis are described. Experimental tests have been carried out to verify the performance of the FTS system. This long-stroke FTS has the advantage of easy machining, high resonance frequency, and error compensation in y-axis direction. |
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