| Abstract: | In this paper,we present a theoretical study on the discharge characteristics of radio-frequency discharges at atmospheric pressure driven by a higher frequency of 40.68 MHz while the electrode gap is altered.Based on the analytical equations and simulation data from a one-dimensional fluid model,an optimal gap between electrodes,at which the largest electron density is obtained,can be observed under a constant power condition;however,as the electrode gap increases the time-averaged electron temperature decreases,and the underpinning physics is also discussed based on the simulation results.This study indicates that at a constant power by choosing an appropriate electrode spacing,the rf discharge can be effectively optimized at atmospheric pressure. |
