| 基于数学形态学的微位移测量方法的研究 |
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| 引用本文： | 傅继武,刘南生,谈振兴,王鸣.基于数学形态学的微位移测量方法的研究[J].光电子．激光,2005,16(3):336-339. |
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| 作者姓名： | 傅继武 刘南生 谈振兴 王鸣 |
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| 作者单位： | 南昌大学理学院物理系,江西,南昌330047;南京师范大学物理科学与技术学院,光电技术江苏省重点实验室,江苏,南京,210097 |
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| 基金项目： | 江西省自然科学基金资助项目(0312003)，江苏省光电技术重点实验室开放基金资助项目(KJS01040) |
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| 摘 要： | 用CCD摄像传感器摄取激光干涉图纹，采用Visual C^ 编程，对干涉图像用反高斯变换的光强平均分布的快速处理，保证干涉图纹信息的完整性；同时运用数字图像处理学中的LOG算子对干涉图像进行边缘检测，用数学形态学中的零交叉细化处理方法对干涉条纹进行细化处理，从而测量出引起条纹相位变化的微位移，其精度可达1／100的条纹间隔。可实现光学亚μm和nm尺度的测量。
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| 关 键 词： | 干涉条纹 数学形态学 图像处理 高斯分布 条纹细化 微位移 条纹相位 |
| 文章编号： | 1005-0086(2005)03-0336-04 |
Research on the Micro Displacement Measurement by Using the Morphology |
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| FU Ji-wu LIU Nan-sheng,TAN Zhen-xin,WANG Ming.Research on the Micro Displacement Measurement by Using the Morphology[J].Journal of Optoelectronics·laser,2005,16(3):336-339. |
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| Authors: | FU Ji-wu LIU Nan-sheng TAN Zhen-xin WANG Ming |
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| Affiliation: | FU Ji-wu LIU Nan-sheng~1,TAN Zhen-xin~1,WANG Ming~2 |
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| Abstract: | Using the intensity hypodispersion of the anti-Gauss distribution and visual C~(++) program,a series of interference fringes image shot with CCD fast processing method were obtained.To assure the information integrality of the interference fringes,the edge detection instead of binary method with the LOG operator in digital image processing and the effective thinning method of laser interference fringes with zero crossing in the morphology were used.Using the phase of laser interference thining friges,the micro displacement was measured.The experiment indicates that the program is available.The measurement accuracy can achieve one hundredths fringes interval.This method can realize optical measurement in the scale of submicron and millimicron. |
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| Keywords: | Interference fringes morphology image processing Gauss distribution fringes thinning micro-displacement phase of fringes |
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