| EM系列光刻机维修技术 |
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| 引用本文： | 李新霞.EM系列光刻机维修技术[J].微纳电子技术,1999(3). |
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| 作者姓名： | 李新霞 |
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| 作者单位： | 电子部第十三所 |
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| 摘 要： | 介绍了ＥＭ系列光刻机（俄产）的多发故障，如真空传感器及间隙设定单元故障及其维修方法。同时提出对设备的一些保养措施。
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| 关 键 词： | 光刻机 故障 维修 |
Repairing and Maintenance of EM Serial Mask Aligner |
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| Li Xinxia.Repairing and Maintenance of EM Serial Mask Aligner[J].Micronanoelectronic Technology,1999(3). |
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| Authors: | Li Xinxia |
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| Abstract: | This paper describes the common mulfunction of EM serial
mask aligner made in Russia,such as basic principle and mulfunction of vacuum sensor and gap
setting mulfunction,as well as some approaches of repairing maintenance. |
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| Keywords: | Mask alignerMulfunctionMaintenance |
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