A quantum-well-intermixing process for wavelength-agile photonic integrated circuits |
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| Authors: | Skogen EJ Barton JS Denbaars SP Coldren LA |
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| Affiliation: | Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA; |
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| Abstract: | Wavelength-agile photonic integrated circuits are fabricated using a one-step ion implantation quantum-well intermixing process. In this paper, we discuss, the issues in processing optimized widely tunable multisection lasers using this technique and present the results achieved using this process. This quantum-well intermixing process is general in its application and can be used to monolithically integrate a wide variety of optoelectronic components with widely tunable lasers. |
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