微孔光纤测头的研制及应用

基于微孔测量中测头不能做得足够小的技术难题,文中提出采用标准多模通信光纤,按特定的工艺技术方法烧熔光纤测球,再进行封装制成测头,应用在微孔测量中.重点介绍了这种测头的技术参数和成形方法、原理,并对研制的φ0.1 mm光纤测头几何形貌进行实际测量,应用于φ0.6 mm小孔孔径的测量分析,标准偏差不超过0.5μm,取得了很好应用效果.

The Development and Application of Fiber Probe for Small Hole Diameter Measurement

Based on the fact that probe tips can not be fabricated small enough to measure the small hole diameter. A new optical-mechanical fiber probe was presented. The probe is fabricated from standard multi-mode communicate optical Gbers, its very small probe tip is formed using a series of instruments and tools and then it was used to measure small size hole. The probe tips formed method and principle and technical specification were introduced. The fiber probe tips geographic properties with a φ 0. 1 mm diameter was measured and analyised. After that , the fiber probe is used to measure a φ 0.6 mm small hole diameter and get a 0.5 μm standard deviation results, It shows the fiber probe is adapted to measure the small holes.