基于MATLAB的硅各向异性腐蚀过程模拟 |
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引用本文: | 张佩君,黄庆安.基于MATLAB的硅各向异性腐蚀过程模拟[J].半导体学报,2002,23(4):440-444. |
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作者姓名: | 张佩君 黄庆安 |
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作者单位: | 东南大学微电子中心,南京,210096 |
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基金项目: | 教育部科学技术基金;00065; |
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摘 要: | 根据硅各向异性腐蚀特点,在硅各向异性腐蚀速率图基础上,提出算法,利用数学软件MATLAB模拟了几种简单掩膜图形的腐蚀过程.程序从二维掩膜描述出发,找到相关晶面,产生动态的三维几何结构的输出.并推导出凸角补偿时补偿条的相关尺寸.其结果对MEMS加工有一定参考价值.
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关 键 词: | 硅 各向异性腐蚀 MATLAB 模拟 |
文章编号: | 0253-4177(2002)04-0440-05 |
修稿时间: | 2001年5月18日 |
Simulation of Anisotropic Etching of Silicon Based on MATLAB |
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Abstract: | According to the property of anisotropic etching of the single- crystal silicon,som e com puter programs based on MATL AB are described which can be used to simulate the etching processes of simple m ask structures.Starting from the de- scribing of a2 - D m ask layout,the programs find the relevant etching planes and create a dynam ic output of the etched3- D structure.The sim uleted results on the convex corner compensation agree well with available experiments. |
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Keywords: | silicon anisotropic etching MATL AB simulation |
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