| 基于原位纳米力学测试系统的单晶硅微观机械性能实验 |
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| 引用本文： | 王乾.基于原位纳米力学测试系统的单晶硅微观机械性能实验[J].材料开发与应用,2010,25(5):30-33. |
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| 作者姓名： | 王乾 |
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| 作者单位： | 常州轻工职业技术学院,江苏,常州,213164 |
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| 摘 要： | 在纳米硬度计上对单晶硅进行了微压痕测试实验,以对单晶硅的微观力学性能有所认识。微压痕测试表明:单晶硅的弹性模量在压入载荷小于2400μN的范围内随载荷变化而波动变化;而在压入载荷大于2400μN后保持相对的稳定值(约为214GPa);单晶硅的表面硬度在压入载荷小于1000μN的范围内随载荷变化而线性增大,而后突然降低并保持相对的稳定值(13.5GPa~15GPa);单晶硅在纳米压入过程中,材料的破坏形式为脆性破裂,并且随压入载荷的增大而在压痕边沿产生堆积,堆积程度亦逐渐增大。
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| 关 键 词： | 原位纳米力学测试系统 单晶硅 微观机械性能 |
Experimental Study on Micro-Mechanical Properties of Single Crystal Silicon Based on TriboIndenter |
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| Wang Qian.Experimental Study on Micro-Mechanical Properties of Single Crystal Silicon Based on TriboIndenter[J].Development and Application of Materials,2010,25(5):30-33. |
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| Authors: | Wang Qian |
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| Affiliation: | Wang Qian(Changzhou Institute of Light Industry Technology,Changzhou 213164,China) |
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| Abstract: | In order to evaluate the micro mechanical properties of single crystal silicon which are commonly applied in MEMS,a serial of nano-indentation were performed on TriboIndenter,a full featured nano-mechanical test instrument.The results revealed that the micro-mechanical properties of single crystal silicon vary under a certain micro normal load,less than 2400μN.Pile-up and brittle failure occurred on single crystal silicon against micro deformation. |
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| Keywords: | TriboIndenter Single crystal silicon Micro-mechanical property |
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