Two operating modes of palladium film hydrogen sensor based on suspended micro hotplate |
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| Affiliation: | 1. Department of Mathematics, Karnatak University, Pavate Nagar, Dharwad, 580003, India;2. Department of Computer Science (MCA), KLE Technological University, BVB Campus, Hubli, 580031, India;1. I.E. Tamm Theory Department, P.N. Lebedev Physical Institute of Russian Academy of Sciences, Moscow 119991, 53 Leninskii prosp., Russian Federation;2. Far Eastern Federal University, 8 Suhanova St., Vladivostok 690950, Russia;3. KIT – Karlsruhe Institute of Technology, Institute of Technical Thermodynamics, Engelbert-Arnold-Strasse 4, Building 10.91, D-76131, Karlsruhe, Germany;1. Department of Aeronautical Engineering, Sathyabama Institute of Science and Technology, India;2. Department of Mechanical Engineering, Nizwa College of Technology, Muscat, Oman;3. Department of Mechanical Engineering, University of Wyoming, USA;1. Clean Energy Research Lab (CERL), Department of Physics, COMSATS University Islamabad, Lahore Campus, Lahore 54000, Pakistan;2. University of Education, Township, Lahore 54000, Pakistan;3. Sustainable Energy Technologies Center, King Saud University, Riyadh, Saudi Arabia;4. University of Okara, Okara, Pakistan;1. Department of Physics, Siddaganga Institute of Technology, Tumkur, Karnataka, 572103, India;2. Department of Physics, Karnatak University Dharwad, Karnataka, 580003, India |
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| Abstract: | Palladium film hydrogen sensor based on suspended micro hotplate has been fabricated to operate at elevated temperature with low power consumption. Below 150 °C, the response of the sensor to H2 is represented by an increase in resistance. At higher temperature, the phenomenon of resistance reduction appears when it comes into contact with H2. We have researched the reasons for this phenomenon and proposed that the sensitive mechanism is the redox reaction of Pd film on the suspended structure. The suspended substrate can affect the temperature at which redox of the Pd film occurs, and be sensitive to the changes of the surrounding gas stream. When the working temperature is 400 °C, the magnitude of response (S) changes to ?0.4% within 2 s for 200 ppm H2, and S changes to ?3% within 10 s for 4000 ppm H2. This micro hotplate based hydrogen sensor can control the range of operating temperature according to the performance requirements. |
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| Keywords: | Palladium film hydrogen sensor Suspended micro hotplate Elevated temperature Resistance reduction Redox reaction |
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