Preparation of Silicon Nitride-Titanium Nitride and Titanium-Titanium Nitride Composites from (CH3)3SiNHTiCl3-Coated Si3N4 and Ti Particles |
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| Authors: | Chaitanya K. Narula Brian G. Demczyk Paul Czubarow Dietmar Seyferth |
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| Affiliation: | Department of Chemistry, Research Laboratory, Ford Motor Company, MD3083, Dearborn, Michigan 48121;Electron Microbeam Analysis Laboratory, The University of Michigan, Ann Arbor, Michigan 48109;Department of Chemistry, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139 |
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| Abstract: | [(Trimethylsilyl)amino]titanium trichloride, (CH3)3-SiNHTiClj, was isolated as a red-orange crystalline solid in 58% yield from the reaction of TiCl4 with [(CH3)3Si]2NH in 1:1 molar ratio in dichloromethane at —78°C. Pyrolysis of (CH3)3SiNHTiCl3 at 600°C furnished titanium nitride. This precursor is suitable for the preparation of composites and was employed to prepare Si3N4-TiN and Ti-TiN powders by adding Si3N4 particles or titanium powders to a solution of (CH3), SiNHTiCl3 in dichloromethane, drying and pyrolyzing the resulting solid. This precursor also has been used as a binder to prepare Si3N4-TiN and Ti-TiN bodies. High-resolution transmission electron microscopic studies of the Si3N4-TiN composite showed that titanium nitride is concentrated on the surface of the Si3N4 particles. |
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