基于MEMS技术集成硅微棱镜耦合和微流道的近红外表面等离子体谐振芯片

为促进表面等离子体谐振（surface plasmon resonance, SPR）测试技术在片上的实现，提出硅基近红外SPR芯片，由硅微棱镜、金属膜和聚合物微流体通道组成．利用有掩膜和无掩膜各向异性湿法腐蚀加工出底角为25．24。的单微硅棱镜阵列，用有掩膜各向异性湿法腐蚀加工出底角为54．74。的双微硅棱镜阵列，利用聚合物的复制注塑技术加工得到微流体通道．在波长1550nm时进行仿真与实验测试，实验测得以空气、水和乙醇为测试介质的SPR角分别为16．75°、22．58°和22．72°，这些值比以玻璃棱镜加工SPR传感器测得的SPR角要小很多．通过实验表明，近红外SPR芯片可以实现表面等离子体谐振传感器微型化，进而推动微全分析系统的实现，降低其成本并提高其性能．

Near-Infrared Surface Plasmon Resonance Chip with Silicon Micro-Prism and Multi-Micro-Channel Based on MEMS Technology

We presented a miniaturized surface plasmon resonance (SPR) chip composed of a bulk micromachined silicon coupling prism, metal membrane, and microfluidic channels which were made with polymer replication techniques. The silicon prism arrays with base angle of 54.74° or 25.24° were fabricated using mask and maskless anisotropic wet etching in KOH solution. The experimental data and simulated results in the wavelength of 1 550 nm show that the SPR resonance angles measured in air, water and ethanol were approximately 16.75°, 22.58° and 22.72°, respectively, much lower than those of the glass prism coupled SPR sensor. The results are helpful to establish conditions of silicon platform SPR excitation using near-infrared ray (NIR) and to make progress in developing a miniaturized SPR platform for biomedical μTAS with low cost and good performance.