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Design and analysis of asymmetric structure capacitive RF MEMS shunt switch
Authors:Rao  K. Srinivasa  Sailaja   B. V. S.  Vineetha  K. V.  Kumar  P. Ashok  Guha   Koushik  Sravani   K. Girija
Affiliation:1.MEMS Research Center, Department of Electronics and Communication Engineering, Koneru Lakshmaiah Education Foundation (Deemed to be University), Green Fields, Vaddeswaram, Guntur, 522502, India
;2.National MEMS Design Centre, Department of Electronics and Communication Engineering, National Institute of Technology (NIT), Silchar, 788010, Assam, India
;
Abstract:Microsystem Technologies - This paper deals with the study of shunt capacitive RF switches. Comparative study is done on non-uniform designed structures, which are simulated using finite element...
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