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On the mechanical behavior of a wide tunable capacitive MEMS resonator for low frequency energy harvesting applications |
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| Authors: | Ghasemi Salar Afrang Saeid Rezazadeh Ghader Darbasi Sima Sotoudeh Behzad |
| Affiliation: | 1.Department of Electrical Engineering, Faculty of Engineering, Urmia University, Urmia, Iran ;2.Department of Mechanical Engineering, Faculty of Engineering, Urmia University, Urmia, Iran ;3.South Ural State University, Chelyabinsk, Russian Federation ; |
| Abstract: | Microsystem Technologies - We present a method for tuning the resonance frequency of a comb resonator using a combination of mechanically softening and hardening springs in order to achieve a high... |
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