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A class of biaxial micro/meso-scale structures for isotropic in-plane inertial sensing and actuation: design,fabrication and experiments |
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| Authors: | Shan Xiaowei Angeles Jorge Forbes James Richard |
| Affiliation: | 1.Beijing Key Laboratory of Performance Guarantee on Urban Rail Transit Vehicles, School of Mechanical-Electronic and Vehicle Engineering, Beijing University of Civil Engineering and Architecture, Beijing, People’s Republic of China ;2.McGill Centre for Intelligent Machines and Department of Mechanical Engineering, McGill University, Montreal, Canada ; |
| Abstract: | Microsystem Technologies - A micro/meso-scale monolithic architecture was designed, fabricated and tested for in-plane inertial sensing and actuation with isotropic stiffness in the sensitive plane... |
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