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Optical and Structural Properties of TiO2 Thin Films Deposited by RF Magnetron Sputtering |
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| Authors: | Shakoury R. Zarei A. |
| Affiliation: | 1.Physics Department, Faculty of Science, Imam Khomeini International University, Qazvin, Iran ;2.Physics Department, Alzahra University, Vanak, Tehran, Iran ; |
| Abstract: | Silicon - Titanium dioxide thin films were grown by RF magnetron sputtering. After that, deposited TiO2 films were annealed at 300 °C for 2 h. Having used different oxygen flow rates as a... |
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