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Investigation of Strongly Hydrophobic and Thick Porous Silicon Stain Films Properties
Authors:Ayat  Maha  Kechouane  Mohamed  Yaddadene  Chafiaa  Berouaken  Malika  Ayouz  Katia  Boarino  Luca  Gabouze  Noureddine
Affiliation:1.Thin Films and Semiconductors (CMS) Laboratory, University of Sciences and Technology Houari Boumediene, USTHB, Algiers, Algeria
;2.Thin Films, Surfaces and Interfaces (CMSI) Division, Research Center in Semiconductors Technology for Energetics (CRTSE), Algiers, Algeria
;3.Nanofacility, Instituto Nazionale di Ricerca Metrologica, Torino, Italy
;
Abstract:Silicon - Porous silicon (PSi) structures with strong hydrophobicity have been achieved by chemical etching of p-type silicon substrates in a solution based on hydrofluoric acid solution (HF) and...
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