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Low-cost silicon neural probe: fabrication,electrochemical characterization and in vivo validation |
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| Authors: | Rodrigues José A. Pimenta Sara Pereira José P. Gomes Nuno M. Souto Márcio R. Fernandes Helena C. Caetano Inês Soares-Cunha Carina Oliveira João F. Ribeiro João F. Correia José H. |
| Affiliation: | 1.CMEMS-UMinho, Department of Industrial Electronics, University of Minho, Campus de Azurém, 4800-058, Guimarães, Portugal ;2.Life and Health Sciences Research Institute (ICVS), School of Medicine, University of Minho, 4710-057, Braga, Portugal ;3.ICVS/3B’s - PT Government Associate Laboratory, Braga/Guimarães, Portugal ;4.IPCA-EST-2Ai, Polytechnic Institute of Cávado and Ave, Applied Artificial Intelligence Laboratory, Campus of IPCA, Barcelos, Portugal ; |
| Abstract: | Microsystem Technologies - This paper presents the fabrication of a silicon neural probe using low-cost microfabrication technologies, such as thin-films deposition, blade dicing, and... |
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