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铁电阴极材料电子发射机理实验研究
引用本文:陈忠道,白书欣,张树人,郭曙光. 铁电阴极材料电子发射机理实验研究[J]. 材料导报, 2009, 23(10)
作者姓名:陈忠道  白书欣  张树人  郭曙光
作者单位:国防科技大学航天与材料工程学院,长沙,410073;电子科技大学微电子与固体电子学院,成都,610054
摘    要:作为一种新型功能材料,为获得更高的电子发射电流密度和更好的电子束品质,对于铁电电子发射机理的探讨,一直方兴未艾.针对采用锆钛酸铅、钛酸钡和钛酸铋钠这3种不同铁电阴极材料,进行了电子发射实验,并着重对样品电子发射前后的宏微观变化进行了对比分析.认为不同种类的铁电材料遵循不同的电子发射机理,等离子体在发射过程中起着重要作用.对于钛酸钡材料,电子发射以等离子体致电子发射为主;对于钛酸铋钠材料,电子发射以快极化反转电子发射为主;而对于锆钛酸铅材料,2种机理作用兼而有之.

关 键 词:铁电材料  铁电电子发射机理  等离子体致电子发射机理

Experimental Study of the Electron Emission Mechanism of Ferroelectric Cathode Materials
CHEN Zhongdao,BAI Shuxin,ZHANG Shuren,GUO Shuguang. Experimental Study of the Electron Emission Mechanism of Ferroelectric Cathode Materials[J]. Materials Review, 2009, 23(10)
Authors:CHEN Zhongdao  BAI Shuxin  ZHANG Shuren  GUO Shuguang
Affiliation:CHEN Zhongdao1,BAI Shuxin1,ZHANG Shuren2,GUO Shuguang2(1 College of Aerospace , Material Engineering,National University of Defense Technology,Changsha 410073,2 College of Microelectronics , Solid-state Electronics,University of Electronic Science , Technology,Chengdu 610054)
Abstract:Being a novel functional material,the ferroelectric cathode materials are studied well on how to improve their emission current densities and the electron beam qualities.In this paper,the experimental study of the electron emission is carried out with three kinds of ferroelectric cathode materials:lead zirconate titanate,natrium bismuthate titanate,and barium titanate.The results show that different ferroelectrics follow different ferroelectric cathode emission mechanism.Especially,the plasma plays an impor...
Keywords:ferroelectric cathode material  ferroelectrie electron emission mechanism  plasma-induced electron emission mechanism
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