Suspended SU-8 structures for monolithic microfluidic channels

SU-8 photoresist is commonly used in the field of microfabrication as structural material or for molding of microfluidic devices. One major limitation, however, is the difficulty to process partially freestanding SU-8 structures or monolithic closed cavities and channels on-chip. We propose here a simple method for the fabrication of suspended structures, in particular of monolithic SU-8 microchannels. The method is based on the processing of a SU-8 double-layer. Appropriate modification of the optical properties of the upper layer allows for selective crosslinking in the layer sandwich. This process is suitable for versatile layouts comprising open and hollow SU-8 structures on the same chip.