| 等离子体化学气相沉积类金刚石碳膜的特性及应用 |
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| 引用本文： | 蔺增,巴德纯,杨乃恒. 等离子体化学气相沉积类金刚石碳膜的特性及应用[J]. 真空, 2006, 43(3): 14-17 |
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| 作者姓名： | 蔺增 巴德纯 杨乃恒 |
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| 作者单位： | 东北大学真空与流体工程中心,辽宁,沈阳,110004 |
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| 摘 要： | 类金刚石（DLC）膜是含有sp^3杂化态的亚稳态非晶碳膜，是具有极高的硬度、化学稳定性和光学透明性的半导体材料。这篇综述介绍了用等离子体化学气相沉积DLC膜的沉积方法、所制备薄膜的特性及应用，最后展望了DLC膜的发展趋势。
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| 关 键 词： | 类金刚石碳膜 等离子体化学气相沉积 特性 应用 |
| 文章编号： | 1002-0322（2006）03-0014-04 |
| 收稿时间： | 2005-09-23 |
| 修稿时间： | 2005-09-23 |
Characteristics and application of diamond-like carbon films by PECVD |
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| LIN Zeng,BA De-chun,YANG Nai-heng. Characteristics and application of diamond-like carbon films by PECVD[J]. Vacuum(China), 2006, 43(3): 14-17 |
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| Authors: | LIN Zeng BA De-chun YANG Nai-heng |
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| Affiliation: | Vacuum and Fluid Engineering Research Center, Northeastern University, Shenyang 110004, China |
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| Abstract: | Diamond-like carbon(DLC) is an amorphous carbon in metastable state with significant sp~3 bond.As a semiconductor,it has a high hardness,chemical inertia and optical transparency.Reviews and introduces the deposition process,properties and some applications of DLC films by PECVD. |
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| Keywords: | diamond-like carbon plasma enhanced chemical vapor deposition(PECVD) properties applications |
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