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Silicon on insulator material by Wafer Bonding |
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| Authors: | Christine Harendt Charles E Hunt Wolfgang Appel Heinz-Gerd Graf Bernd Höfflinger Elisabeth Penteker |
| Affiliation: | (1) Institute for Microelectronics Allmandring 30a, D-7000, Stuttgart 80, Federal Republic of Germany;(2) Department of Electrical Engineering and Computer Science, University of California, 95616 Davis, CA |
| Abstract: | |
| Keywords: | Silicon on insulator wafer bonding selective etching |
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