| 多孔Al_2O_3薄膜感湿材料的湿敏特性研究 |
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| 引用本文： | 任豪,章佩娴.多孔Al_2O_3薄膜感湿材料的湿敏特性研究[J].传感器与微系统,2002,21(8):11-13. |
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| 作者姓名： | 任豪 章佩娴 |
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| 作者单位： | 1. 广州市光机电工程研究开发中心,广东,广州,510630
2. 中山大学,物理系,广东,广州,510275 |
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| 摘 要： | 通过对阳极氧化多孔Al2 O3 薄膜感湿材料的制备工艺及其电容湿敏特性进行研究 ,将阳极氧化参数对多孔Al2 O3 薄膜的结构和形态的影响与多孔Al2 O3 薄膜作为湿度传感器感湿材料的湿敏特性联系起来进行分析 ,为优化制备工艺参数提供更充分的实验数据 ,使新型多孔Al2 O3 薄膜湿度传感器具有更好的感湿特性。
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| 关 键 词： | 多孔Al2O3薄膜 湿度传感器 阳极氧化 |
| 文章编号： | 1000-9787(2002)08-0011-03 |
| 修稿时间： | 2002年4月10日 |
Research on the humidity sensitive characters of porous Al2O3 thin film humidity response material |
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| REN Hao ,ZHANG Pei-xian.Research on the humidity sensitive characters of porous Al2O3 thin film humidity response material[J].Transducer and Microsystem Technology,2002,21(8):11-13. |
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| Authors: | REN Hao ZHANG Pei-xian |
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| Affiliation: | REN Hao 1,ZHANG Pei-xian 2 |
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| Abstract: | The preparation technologies and the capacitance humidity sensitive characters of anodic oxidation porous Al 2O 3 thin film have been investigated.The humidity response characters had been analyzed with the affection of anodic oxidation parameters on the structure and morphology of porous Al 2O 3 thin film,as a high quality humidity response material of humidity sensor.So it could put forth more sufficient experiment datum to improve the processing parameters and made this new porous Al 2O 3 thin film humidity sensor with more splendid humidity response properties. |
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| Keywords: | porous Al 2O 3 thin film humidity sensor anodic oxidation |
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