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Templated growth of tungsten oxide micro/nanostructures using aerosol assisted chemical vapour deposition |
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| Authors: | CS Blackman V Katko IP Parkin T Trifonov |
| Affiliation: | a Department of Chemistry, University College London, 20 Gordon Street, London, WC1H 0AJ, UK b Department d’Enginyeria Electronica, Universitat Rovira i Virgili, 43007 Tarragona, Spain c Department of Micro- and Nanoelectronics, Belarusian State University of Informatics and Radioelectronics, 220013 Minsk, Belarus d Department d’Enginyeria Electronica, Universitat Politècnica de Catalunya, 08034 Barcelona, Spain |
| Abstract: | Porous anodized alumina (PAA) and macroporous silicon (MS) substrates have been used to template the growth of tungsten oxide via aerosol assisted chemical vapour deposition from the precursor tungsten hexaphenoxide. The results show that thin PAA substrates have potential as templates for growing microstructured tungsten oxide films and MS substrates cause the growth of ‘grids’ of polycrystalline tungsten oxide. |
| Keywords: | Chemical vapour deposition Electron microscopy Microstructure Tungsten oxide |
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