Optical properties of BaTiO3 thin films: Influence of oxygen pressure utilized during pulsed laser deposition |
| |
| Authors: | J. Hiltunen D. Seneviratne R. Sun M. Stolfi H. L. Tuller J. Lappalainen V. Lantto |
| |
| Affiliation: | (1) Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139, USA;(2) Technical Research Centre of Finland, Kaitovayla 1, Fin-90571 Oulu, Finland;(3) Microelectronics and Materials Physics Laboratories, University of Oulu, P.O. Box 4500, FIN-90014 Oulu, Finland |
| |
| Abstract: | The crystallographic properties of BaTiO3 thin films, grown by pulsed laser deposition on MgO substrates, were found to be strongly influenced by the oxygen pressure used during growth. Low pressure grown films were c-oriented while increasing oxygen pressure produced films with preferred a-orientation. The crystal reorientation resulted in the shift of optical birefringence from +0.04 to −0.025 with low levels of birefringence in films possessing low tetragonal distortion. Mach-Zehnder electro-optic waveguide modulators were fabricated to characterize the electro-optic properties of the deposited films and to evaluate the suitability of these films for planar optical applications. An effective electro-optic coefficient of 23 pm/V was obtained for a c-axis oriented film near the crystal c→a reorientation point. |
| |
| Keywords: | BaTiO3 Thin film Electro-optic Birefringence |
| 本文献已被 SpringerLink 等数据库收录！ |
|
