Transmission electron microscope specimen preparation for exploring the buried interfaces in plan view |
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| Authors: | G. Z. RADNÓ CZI,& B. PÉ CZ |
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| Affiliation: | Research Institute for Technical Physics and Materials Science (MFA) of the Hungarian Academy of Sciences, H-1525 Budapest, P.O. Box 49, Hungary |
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| Abstract: | A relatively easy and convenient process for the preparation of transmission electron microscope specimens of buried interfaces is described. The method is based on the alignment and realignment of the specimen rotation centre during ion milling. The ion‐milling time interval in which good samples are obtained is substantially extended in this way. |
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| Keywords: | Buried interface interface plan view sample preparation transmission electron microscope |
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