草酸/磷酸混合介质制备高质量阳极氧化铝模板

以草酸为主导酸、磷酸为辅助酸的混合介质作为电解液,采用不对称二次氧化法制备阳极氧化铝模板(AAO模板),通过调节电压、介质配比和酸的浓度等方式研究其生长机制及优化条件.利用扫描电子显微镜(SEM)和电流监测装置对得到的AAO模板进行表征,结果表明在低压(40 V)、较低浓度草酸条件下,适量掺杂磷酸可以提升模板阵列有序性、孔洞规则性及孔径;在高压(80 V)下制备出表面具有V字型结构孔洞的模板,当混合介质中主导酸和辅助酸各自适配电压与施加电压差值比为其混合体积比倒数时所制备的模板质量最优,且随电压增大V字型结构的孔径增大,但辅助酸掺杂量不宜过高.本研究可为采用多元介质制备大孔径优质AAO模板提供参考.

Preparation of High Quality Anodic Aluminum Oxide Template with Mixed Medium of Oxalic Acid and Phosphoric Acid

Anodic aluminum oxide（ AAO） templates were prepared using mixed medium of oxalic acid being primary and phosphoric acid being assistant as electrolyte by asymmetric two-step oxidation. By regulating voltage,volumetric ratio of the medium and concentration of the acids,the growth mechanism of AAO templates was studied and the preparation conditions optimized correspondingly. The AAO templates were characterized by scanning electron microscope（ SEM） and Keithley multimeter. Results show that under the condition of low voltage（ 40 V） and low oxalic acid concentration,appropriate addition of phosphoric acid can enhance array ordering,aperture size and regularity of AAO templates; at high voltage（ 80 V） templates with V-structure apertures were obtained,the templates were superior when the ratio of the difference between adaptive voltage and applied voltage of primary acid to that of assistant acid is reciprocal to their volumetric ratio,and aperture size increased with the increase of voltage,provided the proportion of assistant acid was not too high. This study provides reference for preparation of highquality large-aperture AAO templates with multi-media.