Design and preparation of stress-free epitaxial BaTiO3 polydomain films by RF magnetron sputtering |
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| Authors: | Wei Zhang Meiling Yuan Xianyang Wang Wei Pan Chun-Ming Wang Jun Ouyang |
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| Affiliation: | 1.Key Laboratory for Liquid–Solid Structural Evolution and Processing of Materials (Ministry of Education), Engineering Ceramics Key Laboratory of Shandong Province, School of Materials Science and Engineering, Shandong University, Jinan, Shandong 250061, China;2.State Key Laboratory of New Ceramic and Fine Processing, Tsinghua University, Beijing 100084, China;3.School of Physics, Shandong University, Jinan, Shandong 250010, China |
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| Abstract: | Domain structures of BaTiO3 thick films grown on (100) SrTiO3 single-crystal substrates were engineered using an RF magnetron sputtering deposition process. By tuning the sputtering power and cooling rate and using an off-axis sputtering technique to prepare conducting perovskite oxide bottom electrode with heteroepitaxial quality, we have deposited epitaxial tetragonal single-domain and polydomain BaTiO3 films with a self-assembled three-domain architecture. The electrical properties and microstructure of the BaTiO3 films were characterized, and a c/a1/a2 cellular polydomain structure was clearly observed in as-grown films by optical microscopy. Such a polydomain structure was a consequence of a complete relaxation of misfit stresses of the film. Engineering of this self-assembled microstructure has great potential in providing large, field-tunable pyroelectric and electromechanical responses in next-generation microelectronic devices and micro-electro-mechanical systems (MEMS). |
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| Keywords: | 10.04 20.11 30.04 |
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