| 基于AlN压电薄膜的振动能量收集器阵列的制备 |
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| 引用本文： | Shang Zhengguo,Li Dongling,Wen Zhiyu,Zhao Xingqiang. 基于AlN压电薄膜的振动能量收集器阵列的制备[J]. 半导体学报, 2013, 34(11): 114013-4 |
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| 作者姓名： | Shang Zhengguo Li Dongling Wen Zhiyu Zhao Xingqiang |
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| 作者单位： | Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology, Chongqing University;National Center for International Research of Micro/Nano-System and New Material Technology, Chongqing University;Microsystem Research Center of Chongqing University |
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| 基金项目： | supported by the Doctoral Fund of Ministry of Education of China(No.708072) |
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| 摘 要： | The fabrication and measurement results of the vibration energy harvester arrays based on the piezoelectric aluminum nitride(AlN)film are presented.The structure design and fabrication process of the device are introduced.The key material,the AlN film with crystal orientation(002),was deposited by pulsed-DC magnetron sputtering and characterized by X-ray diffraction(XRD).The resonant frequency,power out,and the open circuit voltage of the device are detected.The optimized load of 80 k and a remarkable maximum power out of 30.4 W are obtained when the acceleration of 0.9g(g is standard gravity acceleration)is applied.
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| 关 键 词： | AlN crystal orientation harvester arrays vibration energy |
The fabrication of vibration energy harvester arrays based on AlN piezoelectric film |
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| Shang Zhengguo,Li Dongling,Wen Zhiyu and Zhao Xingqiang. The fabrication of vibration energy harvester arrays based on AlN piezoelectric film[J]. Chinese Journal of Semiconductors, 2013, 34(11): 114013-4 |
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| Authors: | Shang Zhengguo Li Dongling Wen Zhiyu Zhao Xingqiang |
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| Affiliation: | Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400030, China;National Center for International Research of Micro/Nano-System and New Material Technology, Chongqing University, Chongqing 400030, China;Microsystem Research Center of Chongqing University, Chongqing 400030, China;Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400030, China;National Center for International Research of Micro/Nano-System and New Material Technology, Chongqing University, Chongqing 400030, China;Microsystem Research Center of Chongqing University, Chongqing 400030, China;Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400030, China;National Center for International Research of Micro/Nano-System and New Material Technology, Chongqing University, Chongqing 400030, China;Microsystem Research Center of Chongqing University, Chongqing 400030, China;Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400030, China;National Center for International Research of Micro/Nano-System and New Material Technology, Chongqing University, Chongqing 400030, China;Microsystem Research Center of Chongqing University, Chongqing 400030, China |
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| Abstract: | |
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| Keywords: | AlN crystal orientation harvester arrays vibration energy |
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