| 静电梳微谐振子结构的力学分析 |
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| 引用本文： | 宋晓珏,陈晓阳,丁晓红.静电梳微谐振子结构的力学分析[J].机械科学与技术(西安),2000,19(5):760-762. |
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| 作者姓名： | 宋晓珏 陈晓阳 丁晓红 |
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| 作者单位： | [1]上海大学 [2]苏州大学 |
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| 基金项目： | 上海市教委重点学科科研项目!( No.970 10 4) |
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| 摘 要： | 针对微机械领域中常用的静电梳微谐振子 ,对其悬臂梁的两种结构——蟹脚型结构和直脚型结构的受力情况作了分析 ,推导出应力和位移的计算方法 ,据此从理论上阐述了在实际中多用直脚型结构的原因。得出了比国外文献更符合实际情况的分析结果。
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| 关 键 词： | 静电梳微谐振子 蟹脚结构 直脚结构 位移 应力 |
| 修稿时间： | : |
The Mechanical Analysis of Electro-Static Driven Comb Microresonant-Structure |
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| SONG Xiao-yu,CHEN Xiao-yang,DING Xiao-hong.The Mechanical Analysis of Electro-Static Driven Comb Microresonant-Structure[J].Mechanical Science and Technology,2000,19(5):760-762. |
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| Authors: | SONG Xiao-yu CHEN Xiao-yang DING Xiao-hong |
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| Abstract: | This paper investigates two of electro static driven comb microresonant structure suspensions——crab leg flexure and straight leg flexure,which are commonly used in microscopic machine field. The force loads,together with stresses and displacements, of these two flexures are analysed and calculated.Compared with the results by Pisano 2,3] , our results are more accurate and closer to real situation. This explains why straight leg flexures are more commonly used in practice. |
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| Keywords: | Electro static driven comb microresonator Crab leg structure Straight leg structure Displacement Stress |
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