| 反射面平动式光栅光调制器的实现及机电特性分析 |
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| 引用本文： | 伍艺,黄尚廉,张洁,张智海. 反射面平动式光栅光调制器的实现及机电特性分析[J]. 中国机械工程, 2005, 16(14): 1251-1253,1262 |
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| 作者姓名： | 伍艺 黄尚廉 张洁 张智海 |
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| 作者单位： | 重庆大学光电技术及系统教育部重点实验室,重庆,400030 |
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| 摘 要： | 提出了一种新型的光栅光调制器(GLM),它由可动平板阵列和固定光栅构成,通过可动平板的垂直运动,达到调制光束的目的。为验证该结构实现的可能性,得到器件的机电特性,根据微梁的力学理论进行了电力学理论分析,通过Coventor仿真软件进行了有限元仿真。分析表明,该器件所需驱动电压为16V,无明显的迟滞现象,可动平板的有效衍射面积较大,易于实现面阵结构,提高了光学衍射效率。
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| 关 键 词： | MEMS 光栅光调制器 多层梁 弹簧振子 |
| 文章编号： | 1004-132X(2005)14-1251-03 |
Electromechanical Characteristics Analysis for the Reflector-Moveable Grating Light Modulator |
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| Wu Yi,Huang Shanglian,Zhang Jie,Zhang Zhihai. Electromechanical Characteristics Analysis for the Reflector-Moveable Grating Light Modulator[J]. China Mechanical Engineering, 2005, 16(14): 1251-1253,1262 |
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| Authors: | Wu Yi Huang Shanglian Zhang Jie Zhang Zhihai |
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| Affiliation: | Wu Yi Huang Shanglian Zhang Jie Zhang Zhihai Key Lab of Optoelectronic Technology and System of MOE,Chongqing University,Chongqing,400030 |
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| Abstract: | A new grating light modulator(GLM), which consists of a moveable plate array and a fixed grating, was proposed. The incident light was modulated through the move of the plate. The electro-mechanics characteristics of this device were analyzed theoretically, and simulation was carried on by Coventor software. All analyses indicate that, the driven voltage 16V, no obvious hysteresis, large diffractive area, and easy for gaining plane array and high diffraction efficiency,are obtained. |
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| Keywords: | MEMS grating light modulator multi-beam |
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