| T46X型硒镓银单晶炉的研制 |
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| 引用本文： | 高利强,王建春,楚波.T46X型硒镓银单晶炉的研制[J].电子工业专用设备,2005,34(3):28-30,45. |
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| 作者姓名： | 高利强 王建春 楚波 |
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| 作者单位： | 西安理工大学,陕西,西安,710048;西安理工大学,陕西,西安,710048;西安理工大学,陕西,西安,710048 |
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| 摘 要： | 介绍了TDR-46X型单晶炉的设计思路及工作原理,结合拉制单晶的特殊工艺要求,分析了其主要结构及特点。
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| 关 键 词： | 单晶炉 结构 BS法 炉室上升 |
| 文章编号： | 1004-4507(2005)03-0004-28 |
Research and Manufacture of T46X Single Crystal Growth Furnace |
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| GAO Li-qiang,WANG Jian-chun,CHU Bo.Research and Manufacture of T46X Single Crystal Growth Furnace[J].Equipment for Electronic Products Marufacturing,2005,34(3):28-30,45. |
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| Authors: | GAO Li-qiang WANG Jian-chun CHU Bo |
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| Abstract: | The paper introduces the design ideas and principium of the T46X single crystal growth furnace according to the special technics of crystal' growing, interprets main structure and characteristic of the equipment T46X. |
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| Keywords: | Single crystal growth furnace Structure BS method Hearth ascend |
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