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Analytic model of parasitic capacitance attenuation in CMOS deviceswith hyperthin oxides
Authors:Ahmed   K. Ibok   E. Hauser   J.
Affiliation:Conexant Syst. Inc., Newport Beach, CA;
Abstract:The parasitic accumulation capacitance attenuation in MOS structures with hyper-thin oxides has been modelled using a distributed RC network. The simple analytic model is in excellent agreement with a two-dimensional numerical simulation and experimental data
Keywords:
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