Steady-state and transient photoconductivity in hydrogenated amorphous silicon nitride films |
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Authors: | lker Ay Hüseyin Tolunay |
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Affiliation: | Hacettepe University, Department of Physics Engineering, 06532-Beytepe, Ankara, Turkey |
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Abstract: | Amorphous SiNx:H films were prepared by the rf glow-discharge decomposition of ammonia/silane gas mixture with varying nitrogen content. The steady-state photoconductivity and its dependence on light intensity have been investigated in a-SiNx:H as a function of temperature between 100 and 420 K. The electron drift mobility of a set of SiNx:H samples has been determined from their steady-state photoconductivity and response time measurements. The results suggest that electron drift mobility of the samples was nearly unchanged for a low nitrogen content. Two samples containing lowest nitrogen showed higher photoconductivity than that of unalloyed sample within a temperature range including the room temperature. |
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Keywords: | Drift mobility Response time Hydrogenated amorphous silicon |
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