| 加热低电阻率半导体晶片的微波行波谐振器 |
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| 引用本文： | 侯长福 Sirk.,MD.加热低电阻率半导体晶片的微波行波谐振器[J].微波学报,1990,6(4):28-35. |
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| 作者姓名： | 侯长福 Sirk. MD |
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| 作者单位： | 北京无线电测量研究所，亚利桑那州立大学 美国 |
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| 摘 要： | 建立起一台加热低电阻率半导体晶片的行波场谐振器及加热器,实际微波电路测试结果与理论分析相当一致,对能够加热直径达150mm晶片的加热器也进行了研究,另外还给出了温度分布的理论推算及实际温度分布的测量结果,
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| 关 键 词： | 半导体 晶片 微波 行波 谐振器 |
A TRAVELING-WAVE RESONATOR FOR HEATING LOW-RESISTIVITY SILICON RIBBONS AND WAFERS |
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| Hou Changfu Beijing Radio Measurement Institute M.D.Sirkis Arizona State UniversityU,.S.A.A TRAVELING-WAVE RESONATOR FOR HEATING LOW-RESISTIVITY SILICON RIBBONS AND WAFERS[J].Journal of Microwaves,1990,6(4):28-35. |
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| Authors: | Hou Changfu Beijing Radio Measurement Institute MDSirkis Arizona State UniversityU SA |
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| Abstract: | A traveling-wave resonator and applicators for heating low-resistivity semiconductor ribbons and wafers have been studied.The performanee of the microwave circuit agrees reasonably well with theoretical predictions.An applicator for 150-millimeter diameter wafers is described.Theoretical estimates of temperature distributions and some measured temperature distributions are included. |
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| Keywords: | process healing Joule heating Microwave heating Semiconductor Traveling wave resonator |
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