| 耐低温气象压阻传感器研制 |
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| 引用本文： | 张娜,唐慧,梁峭,刘剑,孙海玮. 耐低温气象压阻传感器研制[J]. 传感器与微系统, 2015, 0(8). DOI: 10.13873/J.1000-9787(2015)08-0119-02 |
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| 作者姓名： | 张娜 唐慧 梁峭 刘剑 孙海玮 |
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| 作者单位： | 沈阳仪表科学研究院有限公司,辽宁 沈阳,110043 |
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| 摘 要： | 介绍了一种耐低温气象传感器的制作方法，该传感器应用于航天环控系统，采用扩散硅压阻芯片、TO—8管座装配、硅凝胶封装，体积小、质量轻，对外界恶劣环境适应性强，使用温区在－55～95℃。测试结果显示：该传感器常温静态、高低温性能良好，低温性能甚至比国际产品更有优越性。制作工艺步骤简单、成本低，具有很高的实用价值。
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| 关 键 词： | 压阻 TO-8 硅凝胶 传感器 |
Research and fabrication of low temperature resistant meteorological piezoresistive sensor |
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| ZHANG Na,TANG Hui,LIANG Qiao,LIU Jian,SUN Hai-wei. Research and fabrication of low temperature resistant meteorological piezoresistive sensor[J]. Transducer and Microsystem Technology, 2015, 0(8). DOI: 10.13873/J.1000-9787(2015)08-0119-02 |
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| Authors: | ZHANG Na TANG Hui LIANG Qiao LIU Jian SUN Hai-wei |
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| Abstract: | Introduce method for fabrication of low temperature resistant meteorological sensor,this sensor is used in space environment control system,diffused silicon piezoresistive chip,TO—8 socket and encapsulation with silicon gel,it is small and light,it has strong ability to adapt to harsh environment,and temperature range of-55~95℃. Test results show that the sensor has good performance of high and low temperature at room temperature static state,even more superior than international products. Fabrication process is simple,low cost,and it has very high practical value. |
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| Keywords: | piezoresistive TO-8 silicon gel sensor |
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