| 脉冲激光焊接技术及在集成电路制造中的应用 |
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| 引用本文： | 姜幼卿,韩学斌,赵国义. 脉冲激光焊接技术及在集成电路制造中的应用[J]. 电子工艺技术, 2002, 23(4): 177-180 |
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| 作者姓名： | 姜幼卿 韩学斌 赵国义 |
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| 作者单位： | 华中科技大学,湖北,武汉,430074 |
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| 摘 要： | 综述介绍了脉冲激光作为热源用于焊接的工艺特点，以及激光束质量或模式对焊接质量的重要意义。简要总结了国内外集成电路制造中脉冲激光焊接技术的应用和发展情况。
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| 关 键 词： | 脉冲激光焊接 激光束质量／模式 集成电路 |
| 文章编号： | 1001-3474(2002)04-0177-04 |
| 修稿时间： | 2002-02-14 |
Pulsed Laser Welding Technology and its Application in Integrated Circuit Manufacturing |
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| JIANG You-qing,HAN Xue-bin,ZHAO Guo-yi. Pulsed Laser Welding Technology and its Application in Integrated Circuit Manufacturing[J]. Electronics Process Technology, 2002, 23(4): 177-180 |
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| Authors: | JIANG You-qing HAN Xue-bin ZHAO Guo-yi |
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| Abstract: | Generally introduce the craft futures of pulsed laser used heat sourse in welding,and the important significance of the laser-beam quality/model is discussed on the welding quality.The application and development of pulsed laser welding are simply summed up in the integrated circuit manufacturing of the home and abroad. |
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| Keywords: | Pulsed laser welding Laser beam quality/model Integrated circuit |
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