首页 | 本学科首页   官方微博 | 高级检索  
     


A modular low-cost atomic force microscope for precision mechatronics education
Affiliation:1. State Key Laboratory of Tribology and Institute of Manufacturing Engineering, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China;2. Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipment and Control, Beijing 100084, China;1. Vilnius Gediminas Technical University, Institute of Geodesy, Sauletekio al. 12, LT-10223 Vilnius, Lithuania;2. Kaunas University of Technology, Dept. of Electronics Engineering, K. Donelaicio g. 73, LT-44249 Vilnius, Lithuania;3. City Graduate School, City University London, Northampton Square, London EC1V0HB, United Kingdom
Abstract:
Keywords:Atomic Force Microscope  Active cantilever probe  Modular low-cost system  Precision mechatronics  Piezo scanner design  Education
本文献已被 ScienceDirect 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号