| 标样气体进样系统性能研究 |
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| 引用本文： | 郭美如,李得天,冯焱,赵澜. 标样气体进样系统性能研究[J]. 真空, 2004, 41(6): 33-39 |
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| 作者姓名： | 郭美如 李得天 冯焱 赵澜 |
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| 作者单位： | 兰州物理研究所,甘肃,兰州,730000 |
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| 摘 要： | 介绍了标样气体进样系统配样、进样及校准原理,以及采用单一气体和混合气体对系统性能进行了研究,给出了灵敏度*和相对灵敏度随进样室压力变化的曲线,并对试验结果进行了分析和讨论.
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| 关 键 词： | 标样气体 进样系统 灵敏度* 校准 |
| 文章编号： | 1002-0322(2004)06-0033-07 |
Performance study on reference gas intake system |
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| GUO Mei-ru,LI De-tian,FENG Yan,ZHAO Lan. Performance study on reference gas intake system[J]. Vacuum(China), 2004, 41(6): 33-39 |
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| Authors: | GUO Mei-ru LI De-tian FENG Yan ZHAO Lan |
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| Abstract: | The working principle of the reference gas intake system we developed are introduced, including gas proportioning, intaking and calibrating processes. Single gas and some mixed gases were tested to investigate the performance of the system, thus giving relevant relationships of sensitivity to intake chamber pressure. Testing results are discussed with some conclusions drawn. |
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| Keywords: | reference gas intake system sensitivity calibration |
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